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MEMS2012-12_


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MEMS

MEMS

MEMS
MEMS MEMS MEMS ]MEMS RF

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MEMS
MEMSMicro-Electro-Mechanical SystemsMEMS
MEMS䡤MEMS


MEMS Die ֦ ަ MEMS LIGA()X LIGA () MEMS

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MEMS

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MEMS

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MEMS

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MEMS

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MEMS

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MEMS

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MEMS

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MEMS

1Die attachDC-79202mil 2ASIC Die CoatingDC-7920COB DC-7920 AAC
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11

MEMS

1MEMS Die DC-7920DA6501 2MEMS Die coating4-8022 X3-6211UV PI MEMSDA650148022

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MEMS
1 2 3 4
5MEMS

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1

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2


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C C C

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C C C C C

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(Capacitor)
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? MEMSIC ?

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4MEMS
LGAQFN
ASICMEMS Die ASIC792015um MEMS Die792050umMEMS Die ASICMEMS Die ASIC792015um MEMS Die to ASIC 792050umMEMS Die

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MEMS
MEMS MEMS( ) MEMS MEMSi 90 MEMS
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MEMS

Mass Drive Direction Sense Direction


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MEMS 200um

MEMS ( D D ) Ԧ
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MEMS MEMS

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MEMS
packageLGAQFNASICMEMS Die
ASICMEMS Die ASIC792015um MEMS Die to ASIC 792050um MEMS Die

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MEMS Die Die attach
? ? 1MEMS DieDie attach MEMS Die 2 1807 (Thomas Young, 1773-1829) 3E* = 3 CET 4MEMS -40-100C

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MEMS Die attach
Silicone PROPERTIES Color Durometer Viscositycps) Working Time RT Heat Cure Time Unprimed Adhension Lap Shearpsi Specific Gravity Back 71A 21000 >24hrs 30mins@150C 7920 DA 6501 Translucent 31A 7300 >24hrs 3mins@150C Red 11500 24hrs 30min ramp to 175C+30min@175C 38000 1.5 2.1E+15 Epoxy Ablebond 2025DSI Epoxy Ablebond 84-1LMI Silver 30000 2weeks 60mins@150C

1000 1.2

80 1 2.7E+16

38000 3 5.00E+04

Volume Resistivity ohm-cm 2.1E+15 Dielectric Strength volts/mil

450 5.5
240 -110C 34.5 20-30/g

625 0.9
300 -110C 6 120-150/g

260 3000/6
60/145 -34C 11700/31.8 15-20/g

Young's Modulus(Mpa)
CETPPM TG priceRMB

3000
55 103C 11400 40-50/g
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MEMS Die attach
? 1MEMSSiliconeDie attach EpoxyDie attachMEMS Die attach ? 279201mm*1mm MEMS Die attach ? 3DA 6501 MEMS Die1mm*1mmMEMS Die attach,

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MEMS2012-12_.ppt

MEMS2012-12 - All right reserved ?

MEMS2012-12.._.ppt

MEMS2012-12.. - All right reserved

MEMS(12)_.ppt

MEMS(12)_/__... ,...

BCBMEMS_.pdf

BCB MEMS ( ...MEMS2012-12 38 2 MEMS(12) 122 5...

MEMS_.doc

,MEMS ,...3.1.1 [12,13] IBM ...V :...

MEMS_.ppt

MEMS_/__MEMS

MEMS_.ppt

MEMS (Microelectromechanical Systems, MEMS)...

MEMS_.pdf

MEMS___MEMS

MEMS_.pdf

MEMS :...11012Pa?m3/s... H.____...

MEMS_.pdf

MEMS___

MEMS_.pdf

(,215011) :MEMS...(12):3269--3274.M,Nix 2.5 ,...

MEMS_.pdf

MEMS MEMSIC MEMS MEMSIC...

MEMS_.pdf

# !""# $ MEMS: ...Bi []-2006,12(3) ...

MEMS2_.ppt

MEMS MEMS MEMS ...: ,...

MEMS_.pdf

MEMS_/_...1 ...2005, 12: 63 68. [ 4] . M EM S ...

MEMS()_.ppt

,MEMS F/...?

MEMS.pdf

2012 EPE Equipment for Electronic Products Manufacturing ... MEMS 10 12 Pa m / s ...

MEMS__.pdf

MEMS_ - ,

BCB MEMS _.pdf

15 ,2012 BCB MEMS ..., BCB 1. ...

MEMS1-31_.doc

2. MEMS IC 3. ... ...2 12. ...

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