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MEMS2012-12


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MEMS

MEMS

MEMS
MEMS MEMS MEMS ]MEMS RF

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MEMS
MEMSMicro-Electro-Mechanical SystemsMEMS
MEMS䡤MEMS


MEMS Die ֦ ަ MEMS LIGA()X LIGA () MEMS

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MEMS

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MEMS

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MEMS

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MEMS

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MEMS

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MEMS

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MEMS

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MEMS

1Die attachDC-79202mil 2ASIC Die CoatingDC-7920COB DC-7920 AAC
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11

MEMS

1MEMS Die DC-7920DA6501 2MEMS Die coating4-8022 X3-6211UV PI MEMSDA650148022

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MEMS
1 2 3 4
5MEMS

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1

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2


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C C C

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? MEMSIC ?

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4MEMS
LGAQFN
ASICMEMS Die ASIC792015um MEMS Die792050umMEMS Die ASICMEMS Die ASIC792015um MEMS Die to ASIC 792050umMEMS Die

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MEMS
MEMS MEMS( ) MEMS MEMSi 90 MEMS
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MEMS

Mass Drive Direction Sense Direction


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MEMS 200um

MEMS ( D D ) Ԧ
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MEMS MEMS

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MEMS
packageLGAQFNASICMEMS Die
ASICMEMS Die ASIC792015um MEMS Die to ASIC 792050um MEMS Die

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MEMS Die Die attach
? ? 1MEMS DieDie attach MEMS Die 2 1807 (Thomas Young, 1773-1829) 3E* = 3 CET 4MEMS -40-100C

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MEMS Die attach
Silicone PROPERTIES Color Durometer Viscositycps) Working Time RT Heat Cure Time Unprimed Adhension Lap Shearpsi Specific Gravity Back 71A 21000 >24hrs 30mins@150C 7920 DA 6501 Translucent 31A 7300 >24hrs 3mins@150C Red 11500 24hrs 30min ramp to 175C+30min@175C 38000 1.5 2.1E+15 Epoxy Ablebond 2025DSI Epoxy Ablebond 84-1LMI Silver 30000 2weeks 60mins@150C

1000 1.2

80 1 2.7E+16

38000 3 5.00E+04

Volume Resistivity ohm-cm 2.1E+15 Dielectric Strength volts/mil

450 5.5
240 -110C 34.5 20-30/g

625 0.9
300 -110C 6 120-150/g

260 3000/6
60/145 -34C 11700/31.8 15-20/g

Young's Modulus(Mpa)
CETPPM TG priceRMB

3000
55 103C 11400 40-50/g
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MEMS Die attach
? 1MEMSSiliconeDie attach EpoxyDie attachMEMS Die attach ? 279201mm*1mm MEMS Die attach ? 3DA 6501 MEMS Die1mm*1mmMEMS Die attach,

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MEMS2012-12 - All right reserved ?

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